UHV LT Nanoprobe & NanoSAM
The LT nanoprobe provides full Scanning Tunnelling Microscopy (STM) capabilities with four independent probes at cryogenic temperatures <5K. The UHV microscope is fitted with an in-situ SEM for precise navigation of the probe tips to the site of interest and local electrical measurements. Scanning Auger Microscopy (SAM) capability provides surface compositional analysis on a nanometre scale. Together the techniques can provide a complete electrical and compositional picture of wafer devices and nanostructures.