CVD tool (200mm wafer capability):
SPTS' Delta PECVD systems are used for a wide range of applications within MEMS, compound semiconductors, and advanced packaging. The PECVD tool is capable of depositing a wide range of materials and is is extensively used for fabrication of semiconductor, MEMS and PV devices.
Wafer sizes – small pieces to 200mm wafers.
Plasma enhanced deposition of:
Developing capability for:
Atomic Layer Deposition (ALD)
Nanostructure growth (eg CNT)
Liquid delivery system
Can deposit – a-Si, TEOS, ZnO, SiC, SiO2, Si3N4, DLC